Catalog Description
Micro-opto-electro-mechanical Systems
Introduction to microsystems and micro-electro-mechanical-systems (MEMS) and
their integration with optics; microfabrication and process integration;
MEMS modeling and design; actuator and sensor design; mechanical structure
design; optical system design basics; packaging; optical MEMS application
case studies; scanning systems (Retinal Scanning Displays, Barcode
scanners); projection display systems (DMD and GLV); infrared imaging
cameras; optical switching for telecommunications.
