Research
| This project has two important implications: 1) It addresses the fundamental fabrication issue of integrating nanoscale building blocks with MEMS within the boundaries of batch fabrication, and as a result, 2) it seeks to provide a tool for handling and manipulation at the nanoscale, where MEMS serve as the actuation mechanism and integrated nano end-effectors serve as the interaction sites with the nano world. 1st Generation (2004-2006) 2nd Generation (2006-2010) |