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Copyright © OML 2010

Design by Utku BARAN

 

OML
Koç University Optical Microsystems Laboratory

Laser Scanners for Display and Imaging

      We are developing both MEMS scanners and FR4 scanners for miniaturized display systems and imaging devices.

 

Mems Scanners     

   

 

 

 

 

 

Fig. Arslan, A.; Brown, D.; Davis, W.O.; Holmstrom, S.; Gokce, S.K.; Urey, H.; , "Comb-Actuated Resonant Torsional Microscanner With Mechanical Amplification," Microelectromechanical Systems, Journal of , vol.19, no.4, pp.936-943, Aug. 2010  

     

Miniaturized display and imaging systems increased the interest in MEMS scanners because MEMS scanners can meet the high resolution, low power consumption, and high scanning speed requirements in miniaturized display and imaging systems.

 

  Our main goal in MEMS scanner projects is to investigate different scanner technologies and scanning architectures to meet the compact form-factor, low power consumption, low dynamic deformation, large scan angle and mirror size, and high scanning speed requirements. Both electrostatic comb-drive and electromagnetic actuated scanners are designed and developed at OML.

 

 

 

FR4 Scanners

    As an alternative to silicon MEMS, we developed new opto-electro-mechanical platform using FR4, which is the most commonly used PCB substrate. FR4 as a platform technology is highly versatile and we made a number of interesting demonstrations. We developed FR4 based scanning modules to use as advanced barcode scanner with dynamic focus and energy scavenging devices. FR4 scanners are easily produced at very low-cost in cleanroom-free environment.

 

 

 

 

 

 

 

 

 

 

 

 

* FR4 Laser Scanner With Dynamic Focus

Serhan O. Isikman, Randy B. Sprague, and Hakan Urey,IEEE PHOTONICS

TECHNOLOGY LETTERS, VOL. 21, NO. 4, FEBRUARY 15, 2009

 

 

Fig. Picture of the PCB-based torsional scanner suspended with two flexures integrated with a laser plunger element. Torsion magnet magnetization direction is indicated with an arrow.

 

 

 

MEMS Stages for Microlens Array Scanners

  Microelectromechanical systems (MEMS) have earlier been utilized for beam steering with individual microlenses. The specific application motivating our work is high-resolution beam steering for an endoscopic laser imaging camera that can fit inside a 5 mm diameter tube. To address this need a novel micromechanical stage with a uniaxial set of comb fingers capable of 2D actuation is developed. The 2D stage is furthermore integrated with a vertically mounted microlens array to enable laser beam steering applications.

 

 

 

 

 

 

 

 

 

 

 

 

Fig. To the left an illustration of hybrid MLA integration and a MLA integrated MEMS stage. To the right, a SEM image of the empty stage

MEMS ve FR4 Tarayicilar Sunumu (In Turkish)